Semiconductor manufacturing technology?
Circuits are created by depositing layers of various chemicals and transferring patterns to make the circuit using a short-wavelength lightsource and pattern mask in the step called photolithography.
Semiconductors are manufactured in cleanrooms and much of the process is automated using specialized robotic manufacturing equipment.
How does control technology help semiconductor manufacturing?
The semiconductor industry has set a technology roadmap with targets for continued feature size reductions and gate density increases into the future. Equipment manufactures are getting ready with new equipment to support the higher demands created by smaller features. The position control systems of manufacturing equipment must be able to keep up with these density increases in order to maximize the potential of other density-enabling technologies.
Advanced motion control technology will help to manufacture smaller and smaller features to within tight tolerances, irregardless of unpredictable operating conditions, external disturbances, and vibrations. Control technology is also a major contributor to manufacturing capability. Fast and precise motion will reduce the time required per product, increase the throughput of the manufacturing machines, and improve overall yield.
- frictionless environment (we create an ultra-low-friction environment through brushless motors and air bearings)
- precise sensing (we sense position to sub-nanometer accuracy using laser interferometry)
- isolated from shocks (we isolate the entire system from the environment by mounting it on a vibration isolation table)
- precise control and synchronization of timing (we chose hardware with precise timing control and synchronize sensor sampling to keep jitter under control)
Control and algorithms technology:
- feedback control
- trajectory shaping
- automated controller tuning
- disturbance modeling
- iterative learning